Today’s high purity manufacturing processes, especially those in the semiconductor industry, require extremely high purity process gases in order to protect product quality and ensure product yields. As a result, these processes become more complex and vulnerable to disruptions due to the expiration of flow components, component outgassing, and accidental purifier overload. It is crucial to detect contamination before it is spread throughout a gas piping network or facility.
Key Features:
- High sensitivity
- Broad detection range
- Cost-efficient maintenance and operation
- Best value and performance
- On-board gas regulation
- Carrier gas purifier
- Rotorless valves
- Proven chromatograph
- Internal calibration system
- Preconfigured for use on specific types of gas
see also: Monitors and HMI Solutions